JPS56154149U - - Google Patents

Info

Publication number
JPS56154149U
JPS56154149U JP1980050770U JP5077080U JPS56154149U JP S56154149 U JPS56154149 U JP S56154149U JP 1980050770 U JP1980050770 U JP 1980050770U JP 5077080 U JP5077080 U JP 5077080U JP S56154149 U JPS56154149 U JP S56154149U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1980050770U
Other languages
Japanese (ja)
Other versions
JPS6138181Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980050770U priority Critical patent/JPS6138181Y2/ja
Publication of JPS56154149U publication Critical patent/JPS56154149U/ja
Application granted granted Critical
Publication of JPS6138181Y2 publication Critical patent/JPS6138181Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Coating Apparatus (AREA)
JP1980050770U 1980-04-15 1980-04-15 Expired JPS6138181Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980050770U JPS6138181Y2 (en]) 1980-04-15 1980-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980050770U JPS6138181Y2 (en]) 1980-04-15 1980-04-15

Publications (2)

Publication Number Publication Date
JPS56154149U true JPS56154149U (en]) 1981-11-18
JPS6138181Y2 JPS6138181Y2 (en]) 1986-11-05

Family

ID=29645698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980050770U Expired JPS6138181Y2 (en]) 1980-04-15 1980-04-15

Country Status (1)

Country Link
JP (1) JPS6138181Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135439A (ja) * 1987-11-18 1989-05-29 Mitsubishi Monsanto Chem Co ウェハー製造方法、及びその製造装置
JPH0499829U (en]) * 1991-02-05 1992-08-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01135439A (ja) * 1987-11-18 1989-05-29 Mitsubishi Monsanto Chem Co ウェハー製造方法、及びその製造装置
JPH0499829U (en]) * 1991-02-05 1992-08-28

Also Published As

Publication number Publication date
JPS6138181Y2 (en]) 1986-11-05

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